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CAS 352535-01-4 | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
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CAS 352535-01-4 | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM

CAS 352535-01-4 | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM

Molecular Formula: C12H32HfN4
Molecular Weight: 410.9
Purity: 97% Min.
Package: 100 g / 1 kg / 25 kg
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Specification of CAS 352535-01-4 | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM

ITEMS

SPECIFICATION

Melting point 

<-50 °C

color 

colorless to yellow

storage temp. 

2-8°C

Fp 

52 °F

form 

liquid

Boiling point 

79 °C0.1 mm Hg(lit.)

 

Related Articles of CAS 352535-01-4 | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM

Metal-organic chemical vapor deposition of HfO2 by alternating supply of tetrakis-diethylamino-hafnium and remote-plasma oxygen

S Horii, K Yamamoto, M Asai, H Miya… - Japanese journal of …, 2004 - iopscience.iop.org

 

Evaluation of tetrakis (diethylamino) hafnium Precursor in the Formation of Hafnium Oxide Films Using Atomic Layer Deposition

R Inman, A Deshpande, G Jursich - MRS Online Proceedings Library …, 2003 - cambridge.org

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